文献
J-GLOBAL ID:202002257643075468
整理番号:20A2445877
超薄膜センサとしてのマイクロ波ダイヤモンドベースHBAR Pt蒸着【JST・京大機械翻訳】
Microwave Diamond-based HBAR as Ultrathin Film Sensor. Pt Deposition
著者 (7件):
Sorokin Boris
(Technological Institute for Superhard and Novel Carbon Materials (TISNCM),Moscow, Troitsk,Russia)
,
Kvashnin Gennady
(Technological Institute for Superhard and Novel Carbon Materials (TISNCM),Moscow, Troitsk,Russia)
,
Asafiev Nikita
(Moscow Institute of Physics and Technology,Dolgoprudny, Moscow Region,Russian Federation)
,
Kravchuk Konstantin
(Technological Institute for Superhard and Novel Carbon Materials (TISNCM),Moscow, Troitsk,Russia)
,
Luparev Nikolay
(Technological Institute for Superhard and Novel Carbon Materials (TISNCM),Moscow, Troitsk,Russia)
,
Kvashnin Gennady
(Technological Institute for Superhard and Novel Carbon Materials (TISNCM),Moscow, Troitsk,Russia)
,
Sotnikov Andrey
(Leibniz Institute for Solid State and Materials Research,Dresden,Germany)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2020
号:
IFCS-ISAF
ページ:
1-4
発行年:
2020年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)