文献
J-GLOBAL ID:202002261206732364
整理番号:20A2483658
透過型電子顕微鏡によるシリコンと銅のピラミッド組織化表面における酸素拡散の定量的解析【JST・京大機械翻訳】
Quantitative analysis on the oxygen diffusion in pyramidal textured surfaces of silicon and copper via transmission electron microscopy
著者 (6件):
Wen C.
(State Key Laboratory of Environment-friendly Energy Materials, School of Science, Southwest University of Science and Technology, Mianyang, 621010, China)
,
Cao B.Y.
(State Key Laboratory of Environment-friendly Energy Materials, School of Science, Southwest University of Science and Technology, Mianyang, 621010, China)
,
Shi Z.Q.
(State Key Laboratory of Environment-friendly Energy Materials, School of Science, Southwest University of Science and Technology, Mianyang, 621010, China)
,
Ma Y.J.
(Analytical and Testing Center, Southwest University of Science and Technology, Mianyang, 621010, China)
,
Wang J.X.
(State Key Laboratory of Environment-friendly Energy Materials, School of Science, Southwest University of Science and Technology, Mianyang, 621010, China)
,
Yang W.B.
(State Key Laboratory of Environment-friendly Energy Materials, School of Science, Southwest University of Science and Technology, Mianyang, 621010, China)
資料名:
Materials Science in Semiconductor Processing
(Materials Science in Semiconductor Processing)
巻:
121
ページ:
Null
発行年:
2021年
JST資料番号:
W1055A
ISSN:
1369-8001
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)