文献
J-GLOBAL ID:202002262111564975
整理番号:20A0270489
低周波応用のためのALD酸化ジルコニウムを用いたマイクロ湿度センサ【JST・京大機械翻訳】
Micro Humidity Sensor Using ALD Zirconium Oxide for Low Frequency Applications
著者 (4件):
Izhar
(The Hong Kong University of Science and Technology,Department of Mechanical and Aerospace Engineering,Hong Kong)
,
Wang Xiaoyi
(The Hong Kong University of Science and Technology,Department of Mechanical and Aerospace Engineering,Hong Kong)
,
Xu Wei
(The Hong Kong University of Science and Technology,Department of Mechanical and Aerospace Engineering,Hong Kong)
,
Lee Yi-Kuen
(The Hong Kong University of Science and Technology,Department of Mechanical and Aerospace Engineering,Hong Kong)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2019
号:
SENSORS
ページ:
1-4
発行年:
2019年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)