文献
J-GLOBAL ID:202002269975196965
整理番号:20A0122162
垂直表面上の窒化アルミニウムの有機金属化学蒸着【JST・京大機械翻訳】
Metalorganic chemical vapor deposition of aluminum nitride on vertical surfaces
著者 (6件):
OEsterlund Elmeri
(Aalto University, Department of Electrical Engineering and Automation, PO Box 13500, 00076 Aalto, Finland)
,
Suihkonen Sami
(Aalto University, Department of Electronics and Nanoengineering, PO Box 13500, 00076 Aalto, Finland)
,
Ross Glenn
(Aalto University, Department of Electrical Engineering and Automation, PO Box 13500, 00076 Aalto, Finland)
,
Torkkeli Altti
(Murata Electronics Oy, Myllynkivenkuja 6, 01621 Vantaa, Finland)
,
Kuisma Heikki
(Murata Electronics Oy, Myllynkivenkuja 6, 01621 Vantaa, Finland)
,
Paulasto-Krockel Mervi
(Aalto University, Department of Electrical Engineering and Automation, PO Box 13500, 00076 Aalto, Finland)
資料名:
Journal of Crystal Growth
(Journal of Crystal Growth)
巻:
531
ページ:
Null
発行年:
2020年
JST資料番号:
B0942A
ISSN:
0022-0248
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)