文献
J-GLOBAL ID:202002270625883916
整理番号:20A1716528
くさびプリズムを有する光電子センサを用いた新しいマイクロ/ナノタッチトリガプローブ【JST・京大機械翻訳】
A new micro/nano-touch-trigger probe using an optoelectronic sensor with a wedge prism
著者 (6件):
Xu P.
(School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei 230009, China)
,
Li R. J.
(School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei 230009, China)
,
Jin X. W.
(School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei 230009, China)
,
Wang P. Y.
(School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei 230009, China)
,
Chen L. J.
(School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei 230009, China)
,
Fan K. C.
(School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei 230009, China)
資料名:
Review of Scientific Instruments
(Review of Scientific Instruments)
巻:
91
号:
7
ページ:
076103-076103-3
発行年:
2020年
JST資料番号:
D0517A
ISSN:
0034-6748
CODEN:
RSINAK
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)