文献
J-GLOBAL ID:202002272704250957
整理番号:20A2386712
リン取込によるホットフィラメント化学蒸着成長によるダイヤモンドのn型ドーピング【JST・京大機械翻訳】
n-Type doping of diamond by hot-filament chemical vapor deposition growth with phosphorus incorporation
著者 (7件):
Katamune Yuki
(Department of Electrical and Electronic Engineering, Kyushu Institute of Technology, Kitakyushu, Fukuoka, Japan)
,
Mori Daichi
(Department of Electrical and Electronic Engineering, Kyushu Institute of Technology, Kitakyushu, Fukuoka, Japan)
,
Arikawa Daisuke
(Department of Electrical and Electronic Engineering, Kyushu Institute of Technology, Kitakyushu, Fukuoka, Japan)
,
Izumi Akira
(Department of Electrical and Electronic Engineering, Kyushu Institute of Technology, Kitakyushu, Fukuoka, Japan)
,
Shimaoka Takehiro
(Electric and Electronic Materials Field, National Institute for Materials Science, Tsukuba, Ibaraki, Japan)
,
Ichikawa Kimiyoshi
(Electric and Electronic Materials Field, National Institute for Materials Science, Tsukuba, Ibaraki, Japan)
,
Koizumi Satoshi
(Electric and Electronic Materials Field, National Institute for Materials Science, Tsukuba, Ibaraki, Japan)
資料名:
Applied Physics. A. Materials Science & Processing
(Applied Physics. A. Materials Science & Processing)
巻:
126
号:
11
ページ:
879
発行年:
2020年
JST資料番号:
D0256C
ISSN:
0947-8396
CODEN:
APHYCC
資料種別:
逐次刊行物 (A)
記事区分:
短報
発行国:
ドイツ (DEU)
言語:
英語 (EN)