文献
J-GLOBAL ID:202002273467673164
整理番号:20A0982349
水素化非晶質炭素膜の気相及び膜分析 sp2炭素構造に及ぼすイオン衝撃エネルギーフラックスの影響【JST・京大機械翻訳】
Gas-phase and film analysis of hydrogenated amorphous carbon films: Effect of ion bombardment energy flux on sp2 carbon structures
著者 (11件):
Sugiura Hirotsugu
(Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan)
,
Ohashi Yasuyuki
(Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan)
,
Ishikawa Kenji
(Center for Low-temperature Plasma Sciences, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8601, Japan)
,
Kondo Hiroki
(Center for Low-temperature Plasma Sciences, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8601, Japan)
,
Kato Toshiaki
(Department of Electronic Engineering, Tohoku University, Aoba 6-6-05, Aramaki, Aoba-Ku, Sendai 980-8579, Japan)
,
Kaneko Toshiro
(Department of Electronic Engineering, Tohoku University, Aoba 6-6-05, Aramaki, Aoba-Ku, Sendai 980-8579, Japan)
,
Takeda Keigo
(Faculty of Science and Technology, Meijo University, Shiogamaguchi, Tempaku, Nagoya 468-8502, Japan)
,
Tsutsumi Takayoshi
(Center for Low-temperature Plasma Sciences, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8601, Japan)
,
Hayashi Toshio
(Center for Low-temperature Plasma Sciences, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8601, Japan)
,
Sekine Makoto
(Center for Low-temperature Plasma Sciences, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8601, Japan)
,
Hori Masaru
(Center for Low-temperature Plasma Sciences, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8601, Japan)
資料名:
Diamond and Related Materials
(Diamond and Related Materials)
巻:
104
ページ:
Null
発行年:
2020年
JST資料番号:
W0498A
ISSN:
0925-9635
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)