文献
J-GLOBAL ID:202002286372126233
整理番号:20A2525140
EUV光源におけるレーザ生成プラズマから放出されたSnの注入に関連した集光ミラー上の保護膜の表面形態変化
Surface morphology change of protective film on collector mirror related to implantation of Sn emitted from laser produced plasma in EUV light source
著者 (8件):
Honda Yoshiyuki
(Gigaphoton Inc., Hiratsuka facility, 3-25-1 Shinomiya, Hiratsuka, Kanagawa, 254-8555 Japan)
,
Yanagida Tatsuya
(Gigaphoton Inc., Hiratsuka facility, 3-25-1 Shinomiya, Hiratsuka, Kanagawa, 254-8555 Japan)
,
Shiraishi Yutaka
(Gigaphoton Inc., Hiratsuka facility, 3-25-1 Shinomiya, Hiratsuka, Kanagawa, 254-8555 Japan)
,
Morita Masayuki
(Gigaphoton Inc., Hiratsuka facility, 3-25-1 Shinomiya, Hiratsuka, Kanagawa, 254-8555 Japan)
,
Andou Masahiko
(Gigaphoton Inc., Hiratsuka facility, 3-25-1 Shinomiya, Hiratsuka, Kanagawa, 254-8555 Japan)
,
Tomuro Hiroaki
(Gigaphoton Inc., Hiratsuka facility, 3-25-1 Shinomiya, Hiratsuka, Kanagawa, 254-8555 Japan)
,
Matsuda Akifumi
(Department of Materials Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama, 226-8502 Japan)
,
Yoshimoto Mamoru
(Department of Materials Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama, 226-8502 Japan)
資料名:
Applied Physics Express
(Applied Physics Express)
巻:
13
号:
11
ページ:
115501 (5pp)
発行年:
2020年11月
JST資料番号:
F0599C
ISSN:
1882-0778
CODEN:
APEPC4
資料種別:
逐次刊行物 (A)
記事区分:
短報
発行国:
イギリス (GBR)
言語:
英語 (EN)