文献
J-GLOBAL ID:202002286533468710
整理番号:20A2149648
サブナノメータ表面粗さを有する10ナノメートル深さニオブ酸リチウムナノ構造【JST・京大機械翻訳】
Ten-nanometer-depth lithium niobate nanostructures with sub-nanometer surface roughness
著者 (7件):
Qu Minni
(Center for Advanced Electronic Materials and Devices, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, No. 800, Dongchuan Road, Shanghai 200240, People’s Republic of China)
,
Xu Jian
(Center for Advanced Electronic Materials and Devices, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, No. 800, Dongchuan Road, Shanghai 200240, People’s Republic of China)
,
Tian Miao
(Center for Advanced Electronic Materials and Devices, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, No. 800, Dongchuan Road, Shanghai 200240, People’s Republic of China)
,
Wu Liying
(Center for Advanced Electronic Materials and Devices, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, No. 800, Dongchuan Road, Shanghai 200240, People’s Republic of China)
,
Shen Yunliang
(Center for Advanced Electronic Materials and Devices, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, No. 800, Dongchuan Road, Shanghai 200240, People’s Republic of China)
,
Cheng Xiulan
(Center for Advanced Electronic Materials and Devices, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, No. 800, Dongchuan Road, Shanghai 200240, People’s Republic of China)
,
Wang Ying
(Center for Advanced Electronic Materials and Devices, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, No. 800, Dongchuan Road, Shanghai 200240, People’s Republic of China)
資料名:
Journal of Micromechanics and Microengineering
(Journal of Micromechanics and Microengineering)
巻:
30
号:
10
ページ:
105009 (5pp)
発行年:
2020年
JST資料番号:
W1424A
ISSN:
0960-1317
CODEN:
JMMIEZ
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)