文献
J-GLOBAL ID:202002287292401603
整理番号:20A1202290
電磁放電により設計したタングステン粉末ターゲットの表面焼結 マグネトロンスパッタリングにおける膜合成のための新しいアプローチ【JST・京大機械翻訳】
Surface sintering of tungsten powder targets designed by electromagnetic discharge: A novel approach for film synthesis in magnetron sputtering
著者 (10件):
Wicher B.
(Faculty of Materials Science and Engineering, Warsaw University of Technology, Woloska St. 141, 02-507 Warsaw, Poland)
,
Zdunek K.
(Faculty of Materials Science and Engineering, Warsaw University of Technology, Woloska St. 141, 02-507 Warsaw, Poland)
,
Chodun R.
(Faculty of Materials Science and Engineering, Warsaw University of Technology, Woloska St. 141, 02-507 Warsaw, Poland)
,
Haj Ibrahim S.
(Faculty of Materials Science and Engineering, Warsaw University of Technology, Woloska St. 141, 02-507 Warsaw, Poland)
,
Kubis M.
(Institute of Heat Engineering, Faculty of Power and Aeronautical Engineering, Warsaw University of Technology, Nowowiejska St. 21/25, 00-665 Warsaw, Poland)
,
Lachowski A.
(Institute of High Pressure Physics, Polish Academy of Sciences, Sokolowska St. 29/37, 01-142 Warsaw, Poland)
,
Krol K.
(Institute of Microelectronics and Optoelectronics, Koszykowa St. 75, 00-662 Warsaw, Poland)
,
Jaroszewicz J.
(Faculty of Materials Science and Engineering, Warsaw University of Technology, Woloska St. 141, 02-507 Warsaw, Poland)
,
Minikayev R.
(Institute of Physics, Polish Academy of Sciences, Al. Lotnikow St. 32/46, 02-668 Warsaw, Poland)
,
Nowakowska-Langier K.
(National Centre for Nuclear Research (NCBJ), A. Soltana St. 7, 05-400 Otwock, Poland)
資料名:
Materials & Design
(Materials & Design)
巻:
191
ページ:
Null
発行年:
2020年
JST資料番号:
A0495B
ISSN:
0264-1275
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)