文献
J-GLOBAL ID:202002289731376772
整理番号:20A0614182
ダイヤモンド(110)表面の異方性エッチングによる垂直{111}側壁を持つU字形ダイヤモンド溝の形成【JST・京大機械翻訳】
Formation of U-shaped diamond trenches with vertical {111} sidewalls by anisotropic etching of diamond (110) surfaces
著者 (16件):
Nagai M.
(Graduate School of Natural Science and Technology, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan)
,
Nakamura Y.
(Graduate School of Natural Science and Technology, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan)
,
Yamada T.
(Graduate School of Natural Science and Technology, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan)
,
Tabakoya T.
(Graduate School of Natural Science and Technology, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan)
,
Tabakoya T.
(Advanced Power Electronics Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan)
,
Matsumoto T.
(Graduate School of Natural Science and Technology, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan)
,
Matsumoto T.
(Nanomaterials Research Institute, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan)
,
Inokuma T.
(Graduate School of Natural Science and Technology, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan)
,
Nebel C.E.
(Nanomaterials Research Institute, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan)
,
Nebel C.E.
(Fraunhofer-Institute for Applied Solid State Physics (IAF), Tullastrasse 72, Freiburg 79108, Germany)
,
Makino T.
(Advanced Power Electronics Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan)
,
Yamasaki S.
(Advanced Power Electronics Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan)
,
Yamasaki S.
(Nanomaterials Research Institute, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan)
,
Tokuda N.
(Graduate School of Natural Science and Technology, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan)
,
Tokuda N.
(Advanced Power Electronics Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan)
,
Tokuda N.
(Nanomaterials Research Institute, Kanazawa University, Kanazawa, Ishikawa 920-1192, Japan)
資料名:
Diamond and Related Materials
(Diamond and Related Materials)
巻:
103
ページ:
Null
発行年:
2020年
JST資料番号:
W0498A
ISSN:
0925-9635
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)