文献
J-GLOBAL ID:202002292132088963
整理番号:20A1745839
トロイダル装置NAGDIS-Tにおけるアクチノメトリー法による原子状窒素密度測定
Atomic nitrogen density measurements by actinometry method in the toroidal device NAGDIS-T
著者 (7件):
Kajita Shin
(Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya 464-8603, Japan)
,
Asaoka Koji
(Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan)
,
Tanaka Hirohiko
(Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan)
,
Nishio Ryosuke
(Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan)
,
Tsutsumi Takayoshi
(Center for Low-temperature Plasma Sciences, Nagoya University, Nagoya, 464-8603, Japan)
,
Hori Masaru
(Center for Low-temperature Plasma Sciences, Nagoya University, Nagoya, 464-8603, Japan)
,
Ohno Noriyasu
(Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan)
資料名:
Japanese Journal of Applied Physics
(Japanese Journal of Applied Physics)
巻:
59
号:
8
ページ:
086002 (6pp)
発行年:
2020年08月
JST資料番号:
G0520B
ISSN:
0021-4922
CODEN:
JJAPB6
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)