文献
J-GLOBAL ID:202102215873160198
整理番号:21A2490700
3.1THzにおけるバイマテリアルマイクロカンチレバーFPAに基づく高分子材料の欠陥検出【JST・京大機械翻訳】
Defect Detections of Polymers Materials Based on Bi-Material Microcantilever FPA at 3.1THz
著者 (5件):
Miao Jiahao
(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University,Beijing,China,100871)
,
Xu Jia
(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University,Beijing,China,100871)
,
Liu Yi
(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University,Beijing,China,100871)
,
Tian Yuan
(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University,Beijing,China,100871)
,
Yu Xiaomei
(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University,Beijing,China,100871)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2021
号:
Transducers
ページ:
1092-1095
発行年:
2021年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)