文献
J-GLOBAL ID:202102228312438007
整理番号:21A0343920
ScAlN/ヘテロエピタキシャルダイヤモンドを用いた高周波弾性表面波共振器【JST・京大機械翻訳】
High-frequency surface acoustic wave resonator with ScAlN/hetero-epitaxial diamond
著者 (6件):
Kobayashi Yusuke
(School of Science and Technology, Kwansei Gakuin University, Sanda, Hyogo, Japan)
,
Tsuchiya Toshiki
(School of Science and Technology, Kwansei Gakuin University, Sanda, Hyogo, Japan)
,
Okazaki Masaya
(School of Science and Technology, Kwansei Gakuin University, Sanda, Hyogo, Japan)
,
Asao Yuuki
(Graduate School of Engineering, Chiba University, Yayoi, Inage, Chiba, Japan)
,
Hashimoto Kenya
(Graduate School of Engineering, Chiba University, Yayoi, Inage, Chiba, Japan)
,
Shikata Shinichi
(School of Science and Technology, Kwansei Gakuin University, Sanda, Hyogo, Japan)
資料名:
Diamond and Related Materials
(Diamond and Related Materials)
巻:
111
ページ:
Null
発行年:
2021年
JST資料番号:
W0498A
ISSN:
0925-9635
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)