文献
J-GLOBAL ID:202102242415614070
整理番号:21A1050111
Al_2O_3/Siの界面性質を改善するための湿式化学酸化と表面キャリア寿命シミュレーションと容量-電圧測定を用いたAl_2O_3/SiO_x/Si構造の界面解析【JST・京大機械翻訳】
Wet Chemical Oxidation to Improve Interfacial Properties of Al2O3/Si and Interface Analysis of Al2O3/SiOx/Si Structure Using Surface Carrier Lifetime Simulation and Capacitance-Voltage Measurement
著者 (13件):
Min Kwan Hong
(Photovoltaics Laboratory, Korea Institute of Energy Research, Daejeon 34129, Korea)
,
Min Kwan Hong
(Department of Materials Science and Engineering, Korea University, Seoul 02841, Korea)
,
Choi Sungjin
(Photovoltaics Laboratory, Korea Institute of Energy Research, Daejeon 34129, Korea)
,
Choi Sungjin
(Department of Energy Environment Policy and Technology, Green School (Graduate School of Korea Energy and Environment), Korea University, Seoul 02841, Korea)
,
Jeong Myeong Sang
(Photovoltaics Laboratory, Korea Institute of Energy Research, Daejeon 34129, Korea)
,
Jeong Myeong Sang
(Department of Materials Science and Engineering, Korea University, Seoul 02841, Korea)
,
Park Sungeun
(Photovoltaics Laboratory, Korea Institute of Energy Research, Daejeon 34129, Korea)
,
Kang Min Gu
(Photovoltaics Laboratory, Korea Institute of Energy Research, Daejeon 34129, Korea)
,
Lee Jeong In
(Photovoltaics Laboratory, Korea Institute of Energy Research, Daejeon 34129, Korea)
,
Kang Yoonmook
(Department of Energy Environment Policy and Technology, Green School (Graduate School of Korea Energy and Environment), Korea University, Seoul 02841, Korea)
,
Kim Donghwan
(Department of Materials Science and Engineering, Korea University, Seoul 02841, Korea)
,
Lee Hae-Seok
(Department of Energy Environment Policy and Technology, Green School (Graduate School of Korea Energy and Environment), Korea University, Seoul 02841, Korea)
,
Song Hee-eun
(Photovoltaics Laboratory, Korea Institute of Energy Research, Daejeon 34129, Korea)
資料名:
Energies (Web)
(Energies (Web))
巻:
13
号:
7
ページ:
1803
発行年:
2020年
JST資料番号:
U7016A
ISSN:
1996-1073
CODEN:
ENERGA
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
スイス (CHE)
言語:
英語 (EN)