文献
J-GLOBAL ID:202102253065000885
整理番号:21A0876703
Ar+H_2S混合ガスで作動する反応性高出力インパルスマグネトロンスパッタリングシステムにおけるプラズマ診断【JST・京大機械翻訳】
Plasma Diagnostics in Reactive High-Power Impulse Magnetron Sputtering System Working in Ar + H2S Gas Mixture
著者 (9件):
Hubicka Z.
(Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Prague, Czech Republic)
,
Cada M.
(Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Prague, Czech Republic)
,
Kapran A.
(Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Prague, Czech Republic)
,
Kapran A.
(Charles University, Faculty of Mathematics and Physics, V Holesovickach 2, 180 00 Prague, Czech Republic)
,
Olejnicek J.
(Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Prague, Czech Republic)
,
Ksirova P.
(Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Prague, Czech Republic)
,
Zanaska M.
(Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Prague, Czech Republic)
,
Adamek P.
(Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 00 Prague, Czech Republic)
,
Tichy M.
(Charles University, Faculty of Mathematics and Physics, V Holesovickach 2, 180 00 Prague, Czech Republic)
資料名:
Coatings (Web)
(Coatings (Web))
巻:
10
号:
3
ページ:
246
発行年:
2020年
JST資料番号:
U7162A
ISSN:
2079-6412
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
スイス (CHE)
言語:
英語 (EN)