文献
J-GLOBAL ID:202102261118365846
整理番号:21A0149960
Soak Annealプロセスにおける国内機械大規模生産の調査【JST・京大機械翻訳】
The Investigation of Domestic Machines Large-Scale Production in Soak Anneal Process
著者 (7件):
Yaoting Shen
(Shanghai Huali Integrated Circuit Corporation,Shanghai,China,201210)
,
Lan Jiang
(Shanghai Huali Integrated Circuit Corporation,Shanghai,China,201210)
,
Yan Gui
(Shanghai Huali Integrated Circuit Corporation,Shanghai,China,201210)
,
Qingwei Dong
(Shanghai Huali Integrated Circuit Corporation,Shanghai,China,201210)
,
Kechen Chen
(Shanghai Huali Integrated Circuit Corporation,Shanghai,China,201210)
,
Xinhua Cheng
(Shanghai Huali Integrated Circuit Corporation,Shanghai,China,201210)
,
Jingxun Fang
(Shanghai Huali Integrated Circuit Corporation,Shanghai,China,201210)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2020
号:
CSTIC
ページ:
1-3
発行年:
2020年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)