文献
J-GLOBAL ID:202102290643945971
整理番号:21A2571266
圧電薄膜窒化アルミニウムに基づく大きな走査角とモノリシック集積角度センサを有する2D走査マイクロミラー【JST・京大機械翻訳】
2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride
著者 (14件):
Meinel Katja
(Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany)
,
Melzer Marcel
(Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany)
,
Stoeckel Chris
(Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany)
,
Stoeckel Chris
(Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany)
,
Shaporin Alexey
(Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany)
,
Forke Roman
(Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany)
,
Zimmermann Sven
(Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany)
,
Zimmermann Sven
(Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany)
,
Hiller Karla
(Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany)
,
Hiller Karla
(Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany)
,
Otto Thomas
(Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany)
,
Otto Thomas
(Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany)
,
Kuhn Harald
(Center for Microtechnologies, Chemnitz University of Technology, 09111 Chemnitz, Germany)
,
Kuhn Harald
(Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany)
資料名:
Sensors (Web)
(Sensors (Web))
巻:
20
号:
22
ページ:
6599
発行年:
2020年
JST資料番号:
U7015A
ISSN:
1424-8220
CODEN:
SENSC9
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
スイス (CHE)
言語:
英語 (EN)