文献
J-GLOBAL ID:202202228609465307
整理番号:22A0640045
単一周波数容量結合プラズマのためのインピーダンス整合ネットワークの自己無撞着シミュレーション【JST・京大機械翻訳】
Self-consistent simulation of the impedance matching network for single frequency capacitively coupled plasma
著者 (9件):
Gao Jiamao
(International Joint Research Laboratory of Magnetic Confinement Fusion and Plasma Physics, State Key Laboratory of Advanced Electromagnetic Engineering and Technology, School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, People’s Re...)
,
Yu Shimin
(International Joint Research Laboratory of Magnetic Confinement Fusion and Plasma Physics, State Key Laboratory of Advanced Electromagnetic Engineering and Technology, School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, People’s Re...)
,
Wu Hao
(School of Physics, Huazhong University of Science and Technology, Wuhan 430074, People’s Republic of China)
,
Wang Yu
(Department of Physics, Wuhan University of Technology, Wuhan 430070, People’s Republic of China)
,
Wang Zhijiang
(International Joint Research Laboratory of Magnetic Confinement Fusion and Plasma Physics, State Key Laboratory of Advanced Electromagnetic Engineering and Technology, School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, People’s Re...)
,
Pan Yuan
(International Joint Research Laboratory of Magnetic Confinement Fusion and Plasma Physics, State Key Laboratory of Advanced Electromagnetic Engineering and Technology, School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, People’s Re...)
,
Jiang Wei
(International Joint Research Laboratory of Magnetic Confinement Fusion and Plasma Physics, State Key Laboratory of Advanced Electromagnetic Engineering and Technology, School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074, People’s Re...)
,
Jiang Wei
(School of Physics, Huazhong University of Science and Technology, Wuhan 430074, People’s Republic of China)
,
Zhang Ya
(Department of Physics, Wuhan University of Technology, Wuhan 430070, People’s Republic of China)
資料名:
Journal of Physics. D. Applied Physics
(Journal of Physics. D. Applied Physics)
巻:
55
号:
16
ページ:
165201 (10pp)
発行年:
2022年
JST資料番号:
B0092B
ISSN:
0022-3727
CODEN:
JPAPBE
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)