文献
J-GLOBAL ID:202202230639634501
整理番号:22A0707149
熱モードレジストを用いた選択的エッチングによるナノスケールパターン形成Cr膜:X線ビームスプリッタに対する意味【JST・京大機械翻訳】
Nanoscale-Patterned Cr Films by Selective Etching Using a Heat-Mode Resist: Implications for X-ray Beam Splitter
著者 (12件):
Chen Guodong
(Laboratory of Micro-Nano Optoelectronic Materials and Devices, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, China)
,
Chen Guodong
(Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, China)
,
Liu Xing
(Laboratory of Micro-Nano Optoelectronic Materials and Devices, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, China)
,
Liu Xing
(Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, China)
,
Wei Tao
(Suzhou Key Laboratory for Nanophotonic and Nanoelectronic Materials and Its Devices, School of Materials Science and Engineering, Suzhou University of Science and Technology, Jiangsu, China)
,
Zhang Kui
(Laboratory of Micro-Nano Optoelectronic Materials and Devices, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, China)
,
Zhang Kui
(Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, China)
,
Wang Yang
(Laboratory of Micro-Nano Optoelectronic Materials and Devices, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, China)
,
Wang Yang
(Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, China)
,
Zhu Zhendong
(National Institute of Metrology, China)
,
Wei Jingsong
(Laboratory of Micro-Nano Optoelectronic Materials and Devices, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, China)
,
Wei Jingsong
(Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, China)
資料名:
ACS Applied Nano Materials
(ACS Applied Nano Materials)
巻:
5
号:
1
ページ:
1047-1055
発行年:
2022年
JST資料番号:
W5033A
ISSN:
2574-0970
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)