文献
J-GLOBAL ID:202202242178195338
整理番号:22A0456537
±300°/sフルスケール内の0.42°/hBias不安定性を有するウエハレベル真空パッケージMEMSディスク共振器ジャイロスコープ【JST・京大機械翻訳】
A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope With 0.42°/h Bias Instability Within ±300°/s Full Scale
著者 (6件):
Wang Hao
(Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi’an, China)
,
Quan Haiyang
(Beijing Microelectronics Technology Institute, Beijing, China)
,
Zhou Jinqiu
(Beijing Microelectronics Technology Institute, Beijing, China)
,
Zhang Long
(Beijing Microelectronics Technology Institute, Beijing, China)
,
Xie Jianbing
(Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi’an, China)
,
Chang Honglong
(Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi’an, China)
資料名:
IEEE Transactions on Industrial Electronics
(IEEE Transactions on Industrial Electronics)
巻:
69
号:
5
ページ:
5304-5313
発行年:
2022年
JST資料番号:
C0234A
ISSN:
0278-0046
CODEN:
ITIED6
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)