文献
J-GLOBAL ID:202202243773623345
整理番号:22A0640300
レーザ生成弾性表面波技術によるSiO_2薄膜の残留応力の定量的及び非破壊的決定【JST・京大機械翻訳】
Quantitative and nondestructive determination of residual stress for SiO2 thin film by laser-generated surface acoustic wave technique
著者 (6件):
Zhang Li
( Tianjin Key Laboratory of Imaging and Sensing Microelectronic Technology, School of Microelectronics, Tianjin University, Tianjin 300072, People’s Republic of China)
,
Xiao Xia
( Tianjin Key Laboratory of Imaging and Sensing Microelectronic Technology, School of Microelectronics, Tianjin University, Tianjin 300072, People’s Republic of China)
,
Qi Haiyang
( Tianjin Key Laboratory of Imaging and Sensing Microelectronic Technology, School of Microelectronics, Tianjin University, Tianjin 300072, People’s Republic of China)
,
Qi Haiyang
( Zhejiang Institute of Metrology, Hangzhou 310018, People’s Republic of China)
,
Huang Yiting
( Tianjin Key Laboratory of Imaging and Sensing Microelectronic Technology, School of Microelectronics, Tianjin University, Tianjin 300072, People’s Republic of China)
,
Qin Huiquan
( Tianjin Key Laboratory of Imaging and Sensing Microelectronic Technology, School of Microelectronics, Tianjin University, Tianjin 300072, People’s Republic of China)
資料名:
Measurement Science and Technology
(Measurement Science and Technology)
巻:
33
号:
4
ページ:
045601 (8pp)
発行年:
2022年
JST資料番号:
C0354C
ISSN:
0957-0233
CODEN:
MSTCEP
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)