文献
J-GLOBAL ID:202202254523340058
整理番号:22A1114699
溶融ガラスの化学機械研磨中のち密化除去機構の原子的理解【JST・京大機械翻訳】
Atomic understanding of the densification removal mechanism during chemical mechanical polishing of fused glass
著者 (3件):
Liu Wei
(Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China)
,
Yuan Song
(Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China)
,
Guo Xiaoguang
(Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China)
資料名:
Applied Surface Science
(Applied Surface Science)
巻:
591
ページ:
Null
発行年:
2022年
JST資料番号:
B0707B
ISSN:
0169-4332
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)