文献
J-GLOBAL ID:202202261078633167
整理番号:22A1052355
スパッタリング条件の操作によるシリコンドープ窒化チタン被覆の熱的及び機械的安定性の増強【JST・京大機械翻訳】
Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions
著者 (10件):
Mohammadpour Ehsan
(Surface Analysis and Materials Engineering Research Group, College of Science, Health, Engineering and Education, Murdoch University, Murdoch, WA, 6150, Australia)
,
Liew Willey Yun Hsien
(Faculty of Engineering, Universiti Malaysia Sabah, Jalan UMS, 88400, Kota Kinabalu, Sabah, Malaysia)
,
Mondinos Nicholas
(Surface Analysis and Materials Engineering Research Group, College of Science, Health, Engineering and Education, Murdoch University, Murdoch, WA, 6150, Australia)
,
Altarawneh Mohammednoor
(Department of Chemical and Petroleum Engineering, United Arab Emirates University, Sheikh Khalifa Bin Zayed Street, Al-Ain, 15551, United Arab Emirates)
,
Lee Sunghwan
(School of Engineering Technology, Purdue University, West Lafayette, IN, 47907, United States)
,
Radevski Nik
(Surface Analysis and Materials Engineering Research Group, College of Science, Health, Engineering and Education, Murdoch University, Murdoch, WA, 6150, Australia)
,
Minakshi Manickam
(College of Science, Health, Engineering and Education, Murdoch University, Murdoch, WA, 6150, Australia)
,
Amri Amun
(Department of Chemical Engineering, Universitas Riau, Pekanbaru, 28293, Indonesia)
,
Lim Hong Ngee
(Department of Chemistry, Faculty of Science, University Putra Malaysia, 43400, UPM, Serdang, Selangor, Malaysia)
,
Jiang Zhong-Tao
(Surface Analysis and Materials Engineering Research Group, College of Science, Health, Engineering and Education, Murdoch University, Murdoch, WA, 6150, Australia)
資料名:
Journal of Materials Research and Technology
(Journal of Materials Research and Technology)
巻:
17
ページ:
1122-1131
発行年:
2022年
JST資料番号:
W3532A
ISSN:
2238-7854
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)