文献
J-GLOBAL ID:202202267580992564
整理番号:22A0727111
薄膜の化学的品質管理のためのALD中のTOFMSによる元素と分子のリアルタイムin situ平行検出【JST・京大機械翻訳】
Real-Time In Situ Parallel Detection of Elements and Molecules with TOFMS during ALD for Chemical Quality Control of Thin Films
著者 (9件):
Priebe Agnieszka
(Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Switzerland)
,
Dousse Bryan
(Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Switzerland)
,
Dousse Bryan
(Swiss Cluster AG, Switzerland)
,
Tzou Chia-Yu
(TOFWERK AG, Switzerland)
,
Papadopoulos Georgios
(TOFWERK AG, Switzerland)
,
Utke Ivo
(Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Switzerland)
,
Bensaoula Abdelhak
(TOFWERK AG, Switzerland)
,
Michler Johann
(Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Switzerland)
,
Guerra-Nunez Carlos
(Swiss Cluster AG, Switzerland)
資料名:
Journal of Physical Chemistry C
(Journal of Physical Chemistry C)
巻:
126
号:
4
ページ:
1901-1912
発行年:
2022年
JST資料番号:
W1877A
ISSN:
1932-7447
CODEN:
JPCCCK
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)