文献
J-GLOBAL ID:202202268343945482
整理番号:22A0741458
容量結合Ar/CF_4放電におけるElectronパワー吸収モード遷移:ハイブリッドモデリング研究【JST・京大機械翻訳】
Electron power absorption mode transition in capacitively coupled Ar/CF4 discharges: hybrid modeling investigation
著者 (5件):
Wen Ying-Ying
(Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, People’s Republic of China)
,
Li Xin-Yang
(Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, People’s Republic of China)
,
Zhang Yu-Ru
(Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, People’s Republic of China)
,
Song Yuan-Hong
(Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, People’s Republic of China)
,
Wang You-Nian
(Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, People’s Republic of China)
資料名:
Journal of Physics. D. Applied Physics
(Journal of Physics. D. Applied Physics)
巻:
55
号:
20
ページ:
200001 (11pp)
発行年:
2022年
JST資料番号:
B0092B
ISSN:
0022-3727
CODEN:
JPAPBE
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)