文献
J-GLOBAL ID:202202277365283575
整理番号:22A0931574
先端トランジスター向けの極薄強誘電性HfO2-ZrO2超格子ゲートスタック
Ultrathin ferroic HfO2-ZrO2 superlattice gate stack for advanced transistors
著者 (49件):
CHEEMA Suraj S.
(Dep. of Materials Sci. and Engineering, Univ. California, Berkeley, Berkeley, CA, USA)
,
WANG Li-Chen
(Dep. of Materials Sci. and Engineering, Univ. California, Berkeley, Berkeley, CA, USA)
,
RAMESH Ramamoorthy
(Dep. of Materials Sci. and Engineering, Univ. California, Berkeley, Berkeley, CA, USA)
,
SHANKER Nirmaan
(Dep. of Electrical Engineering and Computer Sci., Univ. California, Berkeley, Berkeley, CA, USA)
,
HSU Cheng-Hsiang
(Dep. of Electrical Engineering and Computer Sci., Univ. California, Berkeley, Berkeley, CA, USA)
,
HSU Shang-Lin
(Dep. of Electrical Engineering and Computer Sci., Univ. California, Berkeley, Berkeley, CA, USA)
,
LIAO Yu-Hung
(Dep. of Electrical Engineering and Computer Sci., Univ. California, Berkeley, Berkeley, CA, USA)
,
LI Wenshen
(Dep. of Electrical Engineering and Computer Sci., Univ. California, Berkeley, Berkeley, CA, USA)
,
BAE Jong-Ho
(Dep. of Electrical Engineering and Computer Sci., Univ. California, Berkeley, Berkeley, CA, USA)
,
KWON Daewoong
(Dep. of Electrical Engineering and Computer Sci., Univ. California, Berkeley, Berkeley, CA, USA)
,
HU Chenming
(Dep. of Electrical Engineering and Computer Sci., Univ. California, Berkeley, Berkeley, CA, USA)
,
SALAHUDDIN Sayeef
(Dep. of Electrical Engineering and Computer Sci., Univ. California, Berkeley, Berkeley, CA, USA)
,
JOSE Matthew San
(Dep. of Electrical Engineering, Univ. Notre Dame, Notre Dame, IN, USA)
,
GOMEZ Jorge
(Dep. of Electrical Engineering, Univ. Notre Dame, Notre Dame, IN, USA)
,
CHAKRABORTY Wriddhi
(Dep. of Electrical Engineering, Univ. Notre Dame, Notre Dame, IN, USA)
,
FAY Patrick
(Dep. of Electrical Engineering, Univ. Notre Dame, Notre Dame, IN, USA)
,
DATTA Suman
(Dep. of Electrical Engineering, Univ. Notre Dame, Notre Dame, IN, USA)
,
VOLKMAN Steve K.
(Applied Sci. and Technol., Univ. California, Berkeley, CA, USA)
,
RHO Yoonsoo
(Laser Thermal Lab., Dep. of Mechanical Engineering, Univ. California, Berkeley, CA, USA)
,
GRIGOROPOULOS Costas P.
(Laser Thermal Lab., Dep. of Mechanical Engineering, Univ. California, Berkeley, CA, USA)
,
PINELLI Gianni
(Lincoln Lab., Massachusetts Inst. of Technol., Lexington, MA, USA)
,
RASTOGI Ravi
(Lincoln Lab., Massachusetts Inst. of Technol., Lexington, MA, USA)
,
PIPITONE Dominick
(Lincoln Lab., Massachusetts Inst. of Technol., Lexington, MA, USA)
,
STULL Corey
(Lincoln Lab., Massachusetts Inst. of Technol., Lexington, MA, USA)
,
COOK Matthew
(Lincoln Lab., Massachusetts Inst. of Technol., Lexington, MA, USA)
,
TYRRELL Brian
(Lincoln Lab., Massachusetts Inst. of Technol., Lexington, MA, USA)
,
MOHAMED Mohamed
(Lincoln Lab., Massachusetts Inst. of Technol., Lexington, MA, USA)
,
STOICA Vladimir A.
(Dep. of Materials Sci. and Engineering, Pennsylvania State Univ., Univ. Park, PA, USA)
,
ZHANG Zhan
(Advanced Photon Source, Argonne National Lab., Lemont, IL, USA)
,
FREELAND John W.
(Advanced Photon Source, Argonne National Lab., Lemont, IL, USA)
,
TASSONE Christopher J.
(Stanford Synchrotron Radiation Lightsource, SLAC National Accelerator Lab., Menlo Park, CA, USA)
,
MEHTA Apurva
(Stanford Synchrotron Radiation Lightsource, SLAC National Accelerator Lab., Menlo Park, CA, USA)
,
SAHELI Ghazal
(Applied Materials, Santa Clara, CA, USA)
,
THOMPSON David
(Applied Materials, Santa Clara, CA, USA)
,
SUH Dong Ik
(Res. & Dev. Div., SK hynix, Icheon, KOR)
,
KOO Won-Tae
(Res. & Dev. Div., SK hynix, Icheon, KOR)
,
NAM Kab-Jin
(Semiconductor R&D Center, Samsung Electronics, Gyeonggi-do, KOR)
,
JUNG Dong Jin
(Semiconductor R&D Center, Samsung Electronics, Gyeonggi-do, KOR)
,
SONG Woo-Bin
(Semiconductor R&D Center, Samsung Electronics, Gyeonggi-do, KOR)
,
LIN Chung-Hsun
(Logic Technol. Dev., Intel Corp., Hillsboro, OR, USA)
,
NAM Seunggeol
(Samsung Advanced Inst. of Technol., Samsung Electronics, Suwon, KOR)
,
HEO Jinseong
(Samsung Advanced Inst. of Technol., Samsung Electronics, Suwon, KOR)
,
PARIHAR Narendra
(Dep. of Electrical Engineering, Indian Inst. of Technol. Bombay, Mumbai, IND)
,
MAHAPATRA Souvik
(Dep. of Electrical Engineering, Indian Inst. of Technol. Bombay, Mumbai, IND)
,
SHAFER Padraic
(Advanced Light Source, Lawrence Berkeley National Lab., Berkeley, CA, USA)
,
RAMESH Ramamoorthy
(Dep. of Physics, Univ. California, Berkeley, Berkeley, CA, USA)
,
RAMESH Ramamoorthy
(Materials Sci. Div., Lawrence Berkeley National Lab., Berkeley, CA, USA)
,
SALAHUDDIN Sayeef
(Materials Sci. Div., Lawrence Berkeley National Lab., Berkeley, CA, USA)
,
CISTON Jim
(National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Lab., Berkeley, CA, USA)
資料名:
Nature (London)
(Nature (London))
巻:
604
号:
7904
ページ:
65-71
発行年:
2022年04月07日
JST資料番号:
D0193B
ISSN:
0028-0836
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)