文献
J-GLOBAL ID:202202277824031459
整理番号:22A0388698
化学ポテンシャル制御による平滑N極性GaNにおける系統的酸素不純物還元【JST・京大機械翻訳】
Systematic oxygen impurity reduction in smooth N-polar GaN by chemical potential control
著者 (9件):
Szymanski Dennis
(Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC, 27695, United States of America)
,
Wang Ke
(Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC, 27695, United States of America)
,
Kaess Felix
(Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC, 27695, United States of America)
,
Kirste Ronny
(Adroit Materials, Inc., Apex, NC 27539, United States of America)
,
Mita Seiji
(Adroit Materials, Inc., Apex, NC 27539, United States of America)
,
Reddy Pramod
(Adroit Materials, Inc., Apex, NC 27539, United States of America)
,
Sitar Zlatko
(Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC, 27695, United States of America)
,
Sitar Zlatko
(Adroit Materials, Inc., Apex, NC 27539, United States of America)
,
Collazo Ramon
(Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC, 27695, United States of America)
資料名:
Semiconductor Science and Technology
(Semiconductor Science and Technology)
巻:
37
号:
1
ページ:
015005 (5pp)
発行年:
2022年
JST資料番号:
E0503B
ISSN:
0268-1242
CODEN:
SSTEET
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)