文献
J-GLOBAL ID:202202278267024360
整理番号:22A0848394
マイクロ圧力センサのための自立超薄DLC/Si_3N_4/SiO_2【JST・京大機械翻訳】
Self-Supporting Ultrathin DLC/Si3N4/SiO2 for Micro-Pressure Sensor
著者 (6件):
Ma Xin
(State Key Laboratory for Mechanical Manufacturing Systems, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, China)
,
Zhang Qi
(State Key Laboratory for Mechanical Manufacturing Systems, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, China)
,
Guo Peng
(Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, China)
,
Li Hao
(Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, China)
,
Zhao Yulong
(State Key Laboratory for Mechanical Manufacturing Systems, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, China)
,
Wang Aiying
(Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, China)
資料名:
IEEE Sensors Journal
(IEEE Sensors Journal)
巻:
22
号:
5
ページ:
3937-3944
発行年:
2022年
JST資料番号:
W1318A
ISSN:
1530-437X
CODEN:
ISJEAZ
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)