文献
J-GLOBAL ID:202202285594028328
整理番号:22A0977419
反射共鳴マイクロストリップ線路法を用いた薄膜の誘電率測定【JST・京大機械翻訳】
Dielectric Constant Determination for Thin Film by Using Reflection Resonance Microstrip Line Method
著者 (6件):
Zhou Delun
(Beijing National Research Center for Information Science and Technology (BNRist), School of Integrated Circuits, Tsinghua University, Beijing, China)
,
Zhang Yong
(Beijing National Research Center for Information Science and Technology (BNRist), School of Integrated Circuits, Tsinghua University, Beijing, China)
,
Shi Shengqi
(Beijing National Research Center for Information Science and Technology (BNRist), School of Integrated Circuits, Tsinghua University, Beijing, China)
,
Zhang Jinyu
(Beijing National Research Center for Information Science and Technology (BNRist), School of Integrated Circuits, Tsinghua University, Beijing, China)
,
Yue Ruifeng
(Beijing National Research Center for Information Science and Technology (BNRist), School of Integrated Circuits, Tsinghua University, Beijing, China)
,
Wang Yan
(Beijing National Research Center for Information Science and Technology (BNRist), School of Integrated Circuits, Tsinghua University, Beijing, China)
資料名:
IEEE Transactions on Dielectrics and Electrical Insulation
(IEEE Transactions on Dielectrics and Electrical Insulation)
巻:
29
号:
1
ページ:
15-21
発行年:
2022年
JST資料番号:
W0578A
ISSN:
1070-9878
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)