文献
J-GLOBAL ID:202202287918476782
整理番号:22A0847704
感度が増加した二層構造MEMS熱風センサの解析的モデル【JST・京大機械翻訳】
Analytic Model of Dual-Layer-Structure MEMS Thermal Wind Sensor With Increased Sensitivity
著者 (5件):
Cao Zongyuan
(Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, China)
,
Wang Zhenjun
(Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, China)
,
Yi Zhenxiang
(Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, China)
,
Qin Ming
(Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, China)
,
Huang Qing-An
(Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, China)
資料名:
IEEE Transactions on Electron Devices
(IEEE Transactions on Electron Devices)
巻:
69
号:
3
ページ:
1341-1348
発行年:
2022年
JST資料番号:
C0222A
ISSN:
0018-9383
CODEN:
IETDAI
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)