文献
J-GLOBAL ID:202202289812069723
整理番号:22A1049728
FET型ガスセンサ用の埋込みポリSiマイクロヒータにおけるCr/Au接触信頼性の解析【JST・京大機械翻訳】
Analysis of Cr/Au contact reliability in embedded poly-Si micro-heater for FET-type gas sensor
著者 (8件):
Park Jinwoo
(Department of Electrical and Computer Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 08826, Republic of Korea)
,
Jung Gyuweon
(Department of Electrical and Computer Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 08826, Republic of Korea)
,
Hong Seongbin
(Department of Electrical and Computer Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 08826, Republic of Korea)
,
Jeong Yujeong
(Department of Electrical and Computer Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 08826, Republic of Korea)
,
Shin Wonjun
(Department of Electrical and Computer Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 08826, Republic of Korea)
,
Kim Donghee
(Department of Electrical and Computer Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 08826, Republic of Korea)
,
Lee Chayoung
(Department of Electrical and Computer Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 08826, Republic of Korea)
,
Lee Jong-Ho
(Department of Electrical and Computer Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 08826, Republic of Korea)
資料名:
Sensors and Actuators. B. Chemical
(Sensors and Actuators. B. Chemical)
巻:
360
ページ:
Null
発行年:
2022年
JST資料番号:
T0967A
ISSN:
0925-4005
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)