Tabletop Synchrotron for Actinic Mask Defect Inspection
(Proceedings for the Int. Sympo on EUV lithograph 2009)
Tabletop Synchrotron for Actinic Defect Inspection of EUVL Mask
(SEMATECK EUVL2009 Int. Sympo. 2009)
Metrology by a Tabletop Synchrotron MIRRORCLE
(International Workshop on EUV Lithography 2008)
MIRRORCLE light source demonstrating one micron resolution and clear density mapping
(International conference on Developments in X-Ray Tomography 2008)
Portable synchrotron light source for material science and imaging
(国際高等研究所研究会 2008)