Estimation of Plasma Parameters and Bias-Sputtering of Cu Films in Gas-Flow-Sputtering Operating at 1-Torr Pressure Region. Transactions of the Material Research Society of Japan. 2005. vol. 30, p. 311
TWO-DIMENSIONAL PIC SIMULATIONS ON FACE-to-FACE DOUBLE PROBE
(Europhys. Conf. 2008)
ESTIMATION OF MINIMUM SIZE OF ELECTRODES FOR FACE-TO-FACE DOUBLE PROBE USING TWO-DIMENSIONAL PARTICLE-IN-CELL SIMULATION
(International Cong. PLasma Phys. 2008)
日本応用数理学会
, プラズマ・核融合学会
, 日本気象学会
, アメリカ物理学会(American Physical Society)
, 日本物理学会
, The Japan Society of Plasma Science and Nuclear Fusion Research
, The Physical Society of Japan
, American Physical Society