Yuki Matsuoka, Tomoya Tsutsui, Yoshihiro Taguchi, Masaaki Hahsimoto. Design of focus-tunable freeform microlens printed on kirigami MEMS actuator. 2024 International Conference on Optical MEMS and Nanophotonics (OMN). 2024. 1-2
Tomoya Tsutsui, Yoshihiro Taguchi, Masaaki Hashimoto. Fabrication and characterization of VO2 kirigami electrothermal MEMS actuator. 2024 International Conference on Optical MEMS and Nanophotonics (OMN). 2024. 1-2
Kiko Tanaka, Yoshihiro Taguchi, Masaaki Hashimoto. Fabrication of a Soft Photothermal Microactuator Using Two-photon Polymerization and Vacuum Filling. 2024 International Conference on Optical MEMS and Nanophotonics (OMN). 2024. 1-2
Tianzhou Chen, Yoshihiro Taguchi, Masaaki Hashimoto. Bimorph Thermal Microactuator Fabricated by Additive and Subtractive Femtosecond Laser Processing. 2024 International Conference on Optical MEMS and Nanophotonics (OMN). 2024. 1-2