SiC Film Formation by ArF Laser CVD. Proc. 3rd Japan International Society for the Advancement of Material and Process Engineering Symposium, Vol.1, P.1135 (1993)
Isotope Separation of Si by Infrared Multi-photon Decomposition ・・・. Proc. 2nd Japan/China Symposium on Materials for Advanced Energy Systems and Fission and Fusion Engineering, Tokyo (1994) P.297
SiC Film Formation by ArF Laser CVD. Proc. 3rd Japan International Society for the Advancement of Material and Process Engineering Symposium, Vol.1, P.1135 (1993)
Isotope Separation of Si by Infrared Multi-photon Decomposition. Proc. 2nd Japan/China Symposium on Materials for Advanced Energy Systems and Fission and Fusion Engineering, Tokyo (1994) P.297
学歴 (2件):
千葉大学院
千葉大学
学位 (1件):
工学修士
所属学会 (2件):
The Japan Society of Applied Physics
, The Japan Institute of Metals