DEVELOPMENT OF INCHWORM TYPE MOBILE ROBOT MOVABLE IN PIPES WITY T-JUNCTION. PROC. OF AMERICAN SOCIETY FOR PRECISION ENGINEERING 2004 ANNUAL MEETING. 2004. pp.257-260
DEVELOPMENT OF INCHWORM TYPE MOBILE ROBOT MOVABLE IN PIPES WITY T-JUNCTION. PROC. OF AMERICAN SOCIETY FOR PRECISION ENGINEERING 2004 ANNUAL MEETING. 2004. pp.257-260
Fabrication and Simulation of a Gas-Liquid Phase-change Micro-acuator.
Proceedings of the 3rd France-Japan Congress and 1st Europe-Asia Congress on Mechatrouics. 1996
Fabrication and Thermal Analysis of a Gas-liquid Phase-change Micro-actuator.
Micro System Technologies 96. 1996
Analytical Expression of the Damping Ratio of Air-lubricated Slideways.
Proceedings of the 3rd International Conference of Motion and Vibration control. 1996
Theoretickal Analysis of Step Response Characteristics of Air-lubricated Sldewqys for Ultra Pvecision Surface Grinders
International Progress in Precision Engineering(Elsevier社) 1995
Chip yield for FETs-fabricated on low-surface-defect GaAs wafers Grown by a new MBE system
Applications of Surface Science and Electronic Materials 1993
Works (15件)：
1MV大型電子顕微鏡のホログラフィ化の検討
1993 -
1MV大型電子顕微鏡の振動モデル
1993 -
Simulation of Vibration in a Large-scale Electron Microscope
1993 -
A Wafer Cooling Stage for Low Temperature Dry Etching
1992 -
- 1965 TOKYO INSTITUTE OF TECHNOLOGY, POST GRADUATE SCHOOL POSTGRADUATE COURSE OF SCIENCE AND ENGINEERING MECHANICAL ENGINEERING
- 1965 東京工業大学
- 1963 東京工業大学 理工学部 機械工学科
- 1963 東京工業大学
全件表示
学位 (3件)：
工学修士 (東京工業大学)
工学博士 (東京工業大学)
工学博士 (東京工業大学)
受賞 (5件)：
1987 - 発明協会全国発明表彰発明賞
1984 - 精機学会(現・精密工学会)技術賞
1982 - 工作機械技術振興財団論文賞
1980 - 機械振興協会賞
1977 - 日刊工業新聞社十大新製品賞
所属学会 (8件)：
日本ロボット学会
, 日本機械学会
, アメリカ精密工学会(ASPE)
, 精密工学会
, ROBOTICS SOCIETY OF JAPAN
, JAPAN SOCIETY OF MECHANICAL ENGINEERS
, JAPAN SOCIETY FOR PRECISION ENGINEERING
, AMERICAN SOCIETY FOR PRECISION ENGINEERING
