Research and development of ULSI substrates in next generation
論文 (138件):
Yuji Mukaiyama, Yuki Fukui, Toshinori Taishi, Yusuke Noda, Koji Sueoka. Evaluation of numerical simulation of constitutional supercooling during heavily Boron-Doped silicon crystal growth using Cz method. Journal of Crystal Growth. 2023. 619
Akira Sada, Yusuke Noda, Koji Sueoka, Kaoru Kajiwara, Masataka Hourai. First principles analysis on void-reduction mechanism and impact of oxygen in nitrogen-doped CZ-Si crystal. Journal of Crystal Growth. 2023. 610
Takuto Ushiro, Tatsuya Yokoi, Yusuke Noda, Eiji Kamiyama, Masato Ohbitsu, Hiroki Nagakura, Koji Sueoka, Katsuyuki Matsunaga. Preferential Growth Mode of Large-Sized Vacancy Clusters in Silicon: A Neural-Network Potential and First-Principles Study. The Journal of Physical Chemistry C. 2021. 125. 48. 26869-26882
Eiji Kamiyama, Tatsuya Yokoi, Yusuke Noda, Koji Sueoka. Differential clustering of self-interstitials during Si crystal growth. Journal of Crystal Growth. 2021. 574. 126313-126313
Eiji Kamiyama, Koji Sueoka. Prediction of O Aggregation in Straight Line at High Temperature in Si Crystals: Thermal Donors Attaching to an Oxide Precipitate Surface. ECS Journal of Solid State Science and Technology. 2020. 9. 5. 054003-054003