三隅伊知子

ミスミイチコ | Misumi Ichiko

所属機関・部署：
職名：研究グループ長
ホームページURL (1件)： http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=I19947117

研究分野 (2件)：計測工学 , 機械力学、メカトロニクス

論文 (66件)：

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda. Evaluation of the change in photoresist sidewall roughness due to electron beam-induced shrinkage using atomic force microscopy. Journal of Micro/Nanopatterning, Materials, and Metrology. 2023. 22. 04
Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda, Satoru Takahashi. Developmental framework of line edge roughness reference standards for next-generation functional micro-/nanostructures. Precision Engineering. 2023. 83. 152-158
Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda, Satoru Takahashi. Effect of white noise on roughness measurements of self-affine fractals. Measurement Science and Technology. 2023. 34. 10. 105003-105003
Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda. Photoresist shrinkage observation by a metrological tilting-AFM. Metrology, Inspection, and Process Control XXXVII. 2023
Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda. Enhancing the precision of 3D sidewall measurements of photoresist using atomic force microscopy with a tip-tilting technique. Journal of Applied Physics. 2023. 133. 6. 065302-065302

MISC (12件)：

大澤尊光, 権太聡, 三隅伊知子, 佐藤理, 菅原健太郎. ナノ領域トレーサビリティのためのナノスケール標準. 自動車技術. 2009. 63. 5. 97-102
大澤尊光, 権太聡, 三隅伊知子, 佐藤理, 菅原健太郎. ナノスケールものづくりのためのナノスケール標準. 計測と制御 = Journal of the Society of Instrument and Control Engineers. 2008. 47. 9. 757-762
三隅伊知子, 佐藤理, 菅原健太郎. 測長原子間力顕微鏡を用いた段差校正 (特集段差計測). 計測標準と計量管理. 2007. 57. 1. 15-21
Ichiko Misumi, Gaoliang Dai, Gwo-Sheng Peng. Final report on Supplementary Comparison APMP.L-S2: Bilateral comparison on pitch measurements of nanometric lateral scales (50 nm and 100 nm) between NMIJ/AIST (Japan) and PTB (Germany). METROLOGIA. 2007. 44
Pitch measurement of 150 nm 1D-Grating standards using an nanometrological atomic force microscope. 産総研計量標準報告. 2005. 3. 4. 499-506

学位 (1件)：

受賞 (9件)：

2019/05 - 2018 Highlights of Measurement Science and Technology
2018/06 - Precision Engineering Certificate of Outstanding Contribution in Reviewing awarded April 2018 to Ichiko Misumi in recognition of the contributions made to the quality of the journal
2017/01 - The International Society for Optical Engineering, SPIE Certificate of appreciation awarded to Ichiko Misumi for serving as a reviewer for Journal of Micro/Nanolithography, MEMS, and MOEMS during the calendar year of 2016
2014/09 - 11th IMEKO Symposium LMPMI 2014 International Conference Sep. 2-5, 2014, Tsukuba, Japan Excellent Presentation Award "PROFILE SURFACE ROUGHNESS MEASUREMENT USING METROLOGICAL ATOMIC FORCE MICROSCOPE AND UNCERTAINTY EVALUATION"
2011/04 - 平成23年度文部科学大臣表彰(科学技術賞(開発部門)) 「標準ナノスケールと校正技術の開発」

全件表示

所属学会 (1件)：

公益社団法人精密工学会

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三隅 伊知子