研究キーワード (4件):
応用物性・結晶工学
, 電子・電気材料工学
, Applied Physico of Proprty and Chrystallography
, Electronic and Electric Materials Engineering
競争的資金等の研究課題 (2件):
シリコン中の金拡散
Diffusion of Gold in Silicon
MISC (38件):
Formation Mechanism of Plateau, Rapid Fall and Tail in Phosphous Diffusion Profile in Silicon Based on the Pair Diffusion Models of Vacanay Mechanism and Interstitial Mechanism. The 4th International Symposium on Advanced Science and Technology of Science Materials (JSPSS Symposium). 2004. Nov.22-26
Mechanism of Formation of Plateau, Rapid Fall and Tail in Phosphous Diffusion Profile in Silicon Based on the Pair Diffusion Models of Vacanay and Interstitial Mechanism
福岡工業大学研究論集 2004