Leonid Bolotov, Shinji Migita, Ryouta Fujio, Manabu Ishimaru, Shogo Hatayama, Noriyuki Uchida. Impact of annealing on electric and elastic properties of 10-nm Hf0.5Zr0.5O2 films prepared on Si by sputtering. Microelectronic Engineering. 2022. 258
Noriyuki Uchida, Yuta Nakajima, Leonid Bolotov, Wen-Hsin Chang, Tatsuro Maeda, Yuji Ohishi. Heat transport properties of alumina gate insulator films on Ge substrates fabricated by atomic layer deposition. Materials Science in Semiconductor Processing. 2021. 121. 105396-105396
NISHIZAWA Masayasu, BOLOTOV Leonid, KANAYAMA Toshihiko. Dopant-atom distribution measurement at p-n junctions on wet-prepared Si(111):H surfaces by scanning tunneling microscopy. Extended abstracts of the ... Conference on Solid State Devices and Materials. 2006. 2006. 346-347