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J-GLOBAL ID：201602273914123375   整理番号：13A0523761

Deposition of AlN Films on Nitrided Sapphire Substrates by Reactive DC Magnetron Sputtering

著者 (9件)： Wang Xinjian (Changchun Inst. of Optics,Fine Mechanics and Physics,Chinese Acad. of Sciences State key Lab. of Luminescence and ...) ,  Song Hang (Changchun Inst. of Optics,Fine Mechanics and Physics,Chinese Acad. of Sciences State key Lab. of Luminescence and ...) ,  Li Dabing (Changchun Inst. of Optics,Fine Mechanics and Physics,Chinese Acad. of Sciences State key Lab. of Luminescence and ...) ,  Jiang Hong (Changchun Inst. of Optics,Fine Mechanics and Physics,Chinese Acad. of Sciences State key Lab. of Luminescence and ...) ,  Li Zhiming (Changchun Inst. of Optics,Fine Mechanics and Physics,Chinese Acad. of Sciences State key Lab. of Luminescence and ...) ,  Miao Guoqing (Changchun Inst. of Optics,Fine Mechanics and Physics,Chinese Acad. of Sciences State key Lab. of Luminescence and ...) ,  Sun Xiaojuan (Changchun Inst. of Optics,Fine Mechanics and Physics,Chinese Acad. of Sciences State key Lab. of Luminescence and ...) ,  Chen Yiren (Changchun Inst. of Optics,Fine Mechanics and Physics,Chinese Acad. of Sciences State key Lab. of Luminescence and ...) ,  Jia Hui (Changchun Inst. of Optics,Fine Mechanics and Physics,Chinese Acad. of Sciences State key Lab. of Luminescence and ...)
資料名： Faguang Xuebao  (Faguang Xuebao)
巻： 33  号： 2  ページ： 227-232  発行年： 2012年 
JST資料番号： W1380A  ISSN： 1000-7032  CODEN： FAXUEW  資料種別： 逐次刊行物 (A)
発行国： 中国 (CHN)  言語： 英語 (EN)

タイトルに関連する用語 (2件)： AlN ,  DC