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J-GLOBAL ID：201902200331707790   整理番号：19S0477190

Profile surface roughness measurement using metrological atomic force microscope and uncertainty evaluation

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著者 (4件)：
Misumi, Ichiko

Misumi, Ichiko について

(National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), AIST Tsukuba Central 3)

National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), AIST Tsukuba Central 3 について

, 
Naoi, Kazuya

Naoi, Kazuya について

(National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), AIST Tsukuba Central 3)

National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), AIST Tsukuba Central 3 について

, 
Sugawara, Kentaro

Sugawara, Kentaro について

(National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), AIST Tsukuba Central 3)

National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), AIST Tsukuba Central 3 について

, 
Gonda, Satoshi

Gonda, Satoshi について

(National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), AIST Tsukuba Central 3)

National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), AIST Tsukuba Central 3 について


資料名：
Measurement: Journal of the International Measurement Confederation

Measurement: Journal of the International Measurement Confederation について


巻： 73  ページ： 295-303  発行年： 2015年 
JST資料番号： SCOPUS  ISSN： 0263-2241  CODEN： MSRMD 
発行国： オランダ (NLD)  言語： 英語 (EN)

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