文献

J-GLOBAL ID：201902206728070451   整理番号：19S1173297

Micro fabrication technology of ferroelectric film and its application to MEMS

著者 (5件)： Ichiki, Masaaki (MEMS and Packaging Research Group, Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology) ,  Kobayashi, Takeshi (MEMS and Packaging Research Group, Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology) ,  Wang, Zhan-Jie (MEMS and Packaging Research Group, Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology) ,  Maeda, Ryutaro (MEMS and Packaging Research Group, Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology) ,  Hidemasaichikawa (Kondo-Seimitsu Co. Ltd.)
資料名： WSEAS Transactions on Electronics
巻： 3  号： 4  ページ： 237-240  発行年： 2006年 
JST資料番号： SCOPUS  ISSN： 1109-9445 
発行国： ギリシャ (GRC)  言語： 英語 (EN)

タイトルに関連する用語 (2件)： ITS ,  MEMS