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J-GLOBAL ID：201902209385407888   整理番号：19S1351417

Fabrication and characterization of a CNT forest integrated micromechanical resonator for a rarefied gas analyzer in a medium vacuum atmosphere

著者 (8件)： Sugano, Koji (Department of Mechanical Engineering, Graduate School of Engineering, Kobe University) ,  Matsumoto, Ryu (Department of Mechanical Engineering, Graduate School of Engineering, Kobe University) ,  Tsutsui, Ryota (Department of Mechanical Engineering, Graduate School of Engineering, Kobe University) ,  Kishihara, Hiroyuki (Department of Mechanical Engineering, Graduate School of Engineering, Kobe University) ,  Isono, Yoshitada (Department of Mechanical Engineering, Graduate School of Engineering, Kobe University) ,  Matsuzuka, Naoki (Department of Mechanical Engineering, National Institute of Technology, Akashi College) ,  Yamashita, Ichiro (Graduate School of Materials Science, Nara Institute of Science and Technology) ,  Uraoka, Yukiharu (Graduate School of Materials Science, Nara Institute of Science and Technology)
資料名： Journal of Micromechanics and Microengineering
巻： 26  号： 7  発行年： 2016年 
JST資料番号： SCOPUS  ISSN： 0960-1317  CODEN： JMMIE 
発行国： イギリス (GBR)  言語： 英語 (EN)

タイトルに関連する用語 (1件)： CNT