文献
J-GLOBAL ID：201902210136827905   整理番号：19S0366744

A calculation method of deposition profiles in chemical vapor deposition reactors using bio-inspired algorithms

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著者 (6件)：
Takahashi, Takahiro

Takahashi, Takahiro について

(Department of Electrical and Electronic Engineering, Graduate School of Engineering, Shizuoka University)

Department of Electrical and Electronic Engineering, Graduate School of Engineering, Shizuoka University について

, 
Ema, Yoshinori

Ema, Yoshinori について

(Department of Electrical and Electronic Engineering, Graduate School of Engineering, Shizuoka University)

Department of Electrical and Electronic Engineering, Graduate School of Engineering, Shizuoka University について

, 
Inagaki, Taeka

Inagaki, Taeka について

(Department of Electrical and Electronic Engineering, Faculty of Engineering, Shizuoka University)

Department of Electrical and Electronic Engineering, Faculty of Engineering, Shizuoka University について

, 
Nariai, Shingo

Nariai, Shingo について

(Department of Electrical and Electronic Engineering, Faculty of Engineering, Shizuoka University)

Department of Electrical and Electronic Engineering, Faculty of Engineering, Shizuoka University について

, 
Kodama, Junichi

Kodama, Junichi について

(Department of Electrical and Electronic Engineering, Faculty of Engineering, Shizuoka University)

Department of Electrical and Electronic Engineering, Faculty of Engineering, Shizuoka University について

, 
Arakawa, Masamoto

Arakawa, Masamoto について

(Department of Business Administration, Ube National College of Technology)

Department of Business Administration, Ube National College of Technology について


資料名：
Physica Status Solidi (C) Current Topics in Solid State Physics

Physica Status Solidi (C) Current Topics in Solid State Physics について


巻： 12  号： 7  ページ： 908-911  発行年： 2015年 
JST資料番号： SCOPUS  ISSN： 1862-6351 
発行国： ドイツ (DEU)  言語： 英語 (EN)

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