R. Tsuchida, S. Hiraiwa, A. Tsukamoto, M. Washio, A. Oshima. Fabrication of Function-Graded Proton Exchange Membranes for Direct Methanol Fuel Cells Using Electron Beam-Grafting. FUEL CELLS. 2014. 14. 2. 284-290
Constructing a robust PSCAR (TM) process for EUV
(EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY IX 2018)
EUV resist sensitization and roughness improvement by PSCAR (TM) with in-line UV flood exposure system
(ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXV 2018)
Simulation and Experimentation of PSCAR (TM) Chemistry for Complex Structures
(EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY VIII 2017)
Photosensitized Chemically Amplified Resist (TM) (PSCAR (TM)) 2.0 for high throughput and high resolution EUV lithography: Dual photosensitization of acid generation and quencher decomposition by flood exposure
(ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIV 2017)
Sensitivity enhancement of chemically amplified resists and performance study using EUV interference lithography
(EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY VII 2016)