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J-GLOBAL ID：202002214751471166   整理番号：20A2687123

極端紫外フェムト秒パルス用の非晶質および結晶性SiO₂ガラスのアブレーション閾値とクレータ形態

Ablation threshold and crater morphology of amorphous and crystalline SiO₂ glass for extreme ultraviolet femtosecond pulses

著者 (24件)： Shibuya T. (Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8568, Japan) ,  Sakaue K. (Photon Science Center, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan) ,  Ogawa H. (Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8568, Japan) ,  Ogawa H. (AIST-UTokyo Advanced Operando-Measurement Technology Open Innovation Laboratory (OPERANDO-OIL), National Institute of Advanced Industrial Science and Technology (AIST), 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan) ,  Dinh T.-H. (Kansai Photon Science Institute, National Institutes for Quantum and Radiological Science and Technology (QST), 8-1-7 Umemidai, Kizugawa, Kyoto 619-0215, Japan) ,  Satoh D. (Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8568, Japan) ,  Satoh D. (AIST-UTokyo Advanced Operando-Measurement Technology Open Innovation Laboratory (OPERANDO-OIL), National Institute of Advanced Industrial Science and Technology (AIST), 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan) ,  Terasawa E. (AIST-UTokyo Advanced Operando-Measurement Technology Open Innovation Laboratory (OPERANDO-OIL), National Institute of Advanced Industrial Science and Technology (AIST), 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan) ,  Terasawa E. (Research Institute for Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo 169-8555, Japan) ,  Washio M. (Research Institute for Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo 169-8555, Japan) ,  Tanaka M. (Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8568, Japan) ,  Tanaka M. (AIST-UTokyo Advanced Operando-Measurement Technology Open Innovation Laboratory (OPERANDO-OIL), National Institute of Advanced Industrial Science and Technology (AIST), 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan) ,  Higashiguchi T. (Department of Electrical and Electronic Engineering, Faculty of Engineering and Center for Optical Research and Education (CORE), Utsunomiya University, 7-1-2 Yoto, Utsunomiya, Tochigi 321-8585, Japan) ,  Ishino M. (Kansai Photon Science Institute, National Institutes for Quantum and Radiological Science and Technology (QST), 8-1-7 Umemidai, Kizugawa, Kyoto 619-0215, Japan) ,  Kubota Y. (Japan Synchrotron Radiation Research Institute, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan) ,  Kubota Y. (RIKEN SPring-8 Center, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan) ,  Inubushi Y. (Japan Synchrotron Radiation Research Institute, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan) ,  Inubushi Y. (RIKEN SPring-8 Center, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan) ,  Owada S. (Japan Synchrotron Radiation Research Institute, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan) ,  Owada S. (RIKEN SPring-8 Center, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan) ,  Nishikino M. (Kansai Photon Science Institute, National Institutes for Quantum and Radiological Science and Technology (QST), 8-1-7 Umemidai, Kizugawa, Kyoto 619-0215, Japan) ,  Kobayashi Y. (The Institute for Solid State Physics, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan) ,  Kuroda R. (Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8568, Japan) ,  Kuroda R. (AIST-UTokyo Advanced Operando-Measurement Technology Open Innovation Laboratory (OPERANDO-OIL), National Institute of Advanced Industrial Science and Technology (AIST), 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan)
資料名： Japanese Journal of Applied Physics  (Japanese Journal of Applied Physics)
巻： 59  号： 12  ページ： 122004 (3pp)  発行年： 2020年12月 
JST資料番号： G0520B  ISSN： 0021-4922  CODEN： JJAPB6  資料種別： 逐次刊行物 (A)
記事区分： 原著論文  発行国： イギリス (GBR)  言語： 英語 (EN)

抄録/ポイント： 非晶質と結晶性SiO₂ガラスのアブレーション閾値フルエンスとクレータ形態を極端紫外フェムト秒パルスの領域で分析した。非晶質および結晶性SiO₂ガラスの密度(または光学的浸透深さ)の違いにもかかわらず,アブレーション閾値フルエンスおよびクレータ形態は同程度であることが分かった。さらに,13.5nmの波長での以前の研究における10.3nmの波長での実験結果を比較した。アブレーション過程に及ぼす密度または光侵入深さの違いの影響は,数10パーセントと制限されると結論した。Please refer to the publisher for the copyright holders. Translated from English into Japanese by JST.

シソーラス用語： *極端紫外線 ,  *パルス ,  非晶質 ,  結晶度 ,  二酸化ケイ素 ,  *アブレーション ,  クレータ ,  フルエンス ,  *石英ガラス
準シソーラス用語： 極端紫外 ,  *フェムト秒パルス ,  結晶性

分類 (1件)： レーザ照射・損傷  (BK16040S)

タイトルに関連する用語 (8件)： 極端紫外 ,  フェムト秒パルス ,  非晶質 ,  ガラス ,  アブレーション ,  閾値 ,  クレータ ,  形態