遠藤和彦

Endo Kazuhiko

所属機関・部署：
職名：教授
競争的資金等の研究課題 (2件)：

論文 (189件)：

Aditya Saha, Ryuji Oshima, Daisuke Ohori, Takahiko Sasaki, Hirokazu Yano, Hidenori Okuzaki, Takashi Tokumasu, Kazuhiko Endo, Seiji Samukawa. Effect of Interfacial Oxide Layers on Self-Doped PEDOT/Si Hybrid Solar Cells. Energies. 2023. 16. 6900-1-6900-14
Daisuke Ohori, Takahiro Ishihara, Xuelun Wang, Kazuhiko Endo, Tsau-Hua Hsieh, Yiming Li, Nobuhiro Natori, Kazuma Matsui, Seiji Samukawa. Hydrogen iodide (HI) neutral beam etching characteristics of InGaN and GaN for micro-LED fabrication. Nanotechnology. 2023
Shota Nunomura, Hiroyuki Ota, Toshifumi Irisawa, Kazuhiko Endo, Yukinori Morita. Defect generation and recovery in high-k HfO2/SiO2/Si stack fabrication. Applied Physics Express. 2023
Tomoki Harada, Daisuke Ohori, Kazuhiko Endo, Seiji Samukawa, Tetsuo Ikari, Atsuhiko Fukuyama. Lifetime of photoexcited carriers in space-controlled Si nanopillar/SiGe composite films investigated by a laser heterodyne photothermal displacement method. Journal of Applied Physics. 2023. 133. 12
Alvin Loke, Mitsuya Fukazawa, Kazuhiko Endo. 2023 IEEE Symposium on VLSI Technology and Circuits [Conference Reports]. IEEE Solid-State Circuits Magazine. 2023

MISC (4件)：

大堀大介, 野田周一, 藤井卓也, 水林亘, 遠藤和彦, Li Yiming, Lee Yao-Jen, 尾崎卓哉, 寒川誠二. 中性粒子ビーム加工による高移動度Ge FinFETの実現. 応用物理学会学術講演会講演予稿集. 2021. 2021.1. 2361-2361
大堀大介, 竹内聡, 佐藤旭, 石田昌久, 曽田匡洋, 田中麻美, 遠藤和彦, 寒川誠二. フェリチンの2次元配列におけるグリセロール含有溶媒の効果. 応用物理学会学術講演会講演予稿集. 2021. 2021.1. 2307-2307
ZHU J., 高橋言緒, 遠藤和彦, 大堀大介, 寒川誠二, 寒川誠二, 寒川誠二, WANG X.-L., WANG X.-L., WANG X.-L. 中性粒子ビームエッチング法による高効率GaNマイクロLEDの作製. 応用物理学会秋季学術講演会講演予稿集(CD-ROM). 2019. 80th. 3522-3522
大堀大介, 遠藤和彦, 遠藤和彦, 寒川誠二, 寒川誠二. 中性粒子ビームとバイオテンプレートを用いた高アスペクト比Siナノピラー構造の作製. 応用物理学会春季学術講演会講演予稿集(CD-ROM). 2018. 65th. ROMBUNNO.19p-C204-2-1848

書籍 (7件)：

Phenyl silica glass for formation of porous dielectric film
1999
Time-dependent reliability of the interface between a-C : F and inorganic dielectrics
1998
Copper damascene using low dielectric constant fluorinated amorphous carbon interlayer
1998
Aluminum wiring reliability of fluorinated amorphous carbon interlayer
1998
Fluorinated amorphous carbon thin films grown from C4F8 for multilevel interconnections of integrated circuits
1997

講演・口頭発表等 (124件)：

Hydrogen Iodide (HI) Neutral Beam Etching for InGaN/GaN Micro-LED
(Proceedings of the IEEE Conference on Nanotechnology 2022)
Surface wettability of nanopillar array structures fabricated by biolate ultimate top-down processes
(Proceedings of the IEEE Conference on Nanotechnology 2021)
Si Nanopillar/SiGe Composite Structure for Thermally Managed Nano-devices
(Proceedings of the IEEE Conference on Nanotechnology 2021)
Surface wettability of nanopillar array structures fabricated by bio-template ultimate top-down processes
(2021 IEEE 21ST INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE NANO 2021) 2021)
Toward Long-coherence-time Si Spin Qubit: The Origin of Low-frequency Noise in Cryo-CMOS
(Digest of Technical Papers - Symposium on VLSI Technology 2020)

経歴 (3件)：

委員歴 (16件)：

全件表示

受賞 (3件)：

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遠藤 和彦