文献
J-GLOBAL ID:200902246191492952
整理番号:06A0742176
双極型プラズマ系のイオン打ち込みにより調製したDLC膜のRamanスペクトル
Raman Spectra of DLC Films Prepared by Bipolar-type Plasma Based Ion Implantation
著者 (6件):
NAKAO Setsuo
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya)
,
KIM Jongduk
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya)
,
CHOI Junho
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya)
,
MIYAGAWA Soji
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya)
,
MIYAGAWA Yoshiko
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya)
,
IKEYAMA Masami
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Nagoya)
資料名:
Transactions of the Materials Research Society of Japan
(Transactions of the Materials Research Society of Japan)
巻:
31
号:
3
ページ:
685-688
発行年:
2006年09月
JST資料番号:
L4468A
ISSN:
1382-3469
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
日本 (JPN)
言語:
英語 (EN)